R
1
10
116
4
125
R
3
R
4
R
5
R
2
–OUT
+IN
+OUT
–IN
#J?G##
4
5
6
10
11
12
+OUT
+IN
–IN
–OUT
N/C
N/C
#
?5Y J?? ? f##
8/
N
^?? Gás
- ?G±7cPCB(??
?s)!-eTO-8G?
VLSI? ?R?!;?
?N ? $ B?&
ì#1±
êG??^uF,
êG??^u± ?R?!
á=2? e
^??
u=!NovaSensor
?
ás
-?? ?
NPH ?
ì=SenStable
?
?N!mùüzN ?? ?N
&ì￥ ?s
-
u.?!?$üzt?ü1$?t
^J
?9 ?
?
qRV[ <?Yó??f?O100mV!üz?
Y??s
-7? OJ′??d ?!
??? ￡^
??
?c4? f?!''?)2???9°s
-!
μ &?
? ?
Y#
E$? ?P-to-I?
Y#
??$? i
Y#
HVAC$?
Y#
????X ?ü?+ ??$w ?§?
Y#
?^ ?U Kw,
?$w ?R?$?s
-
Y#
w?RH??C
NPH ?
¤ ?$?s
- ??$ ?
éY ?
Y#
¤ ?s
-! KR| ?
Y#
-eTO-8G ?7cPCB
Y#
? ?L^A
Y#
R9°g$ ?$?×$
Y#
7? ??d ?
??? ￡^
?
Y#
1.5mA&ì? ??Yüz100mV ???E ?
Y#
μ &?× ?>?e0.5%FSO
Y#
?A5Y ;Oà$?!$v?
Y#
3/-e?E ?0-10"H2O,0-1psi,0-5psi
Y#
{J ? & ?>?e0.05%FSO
Y#
-e3/16%G v$?#G
Y#
|μ &???!4? f
+H|
28
GEì
??Jf
g
GE
s
-?U?
7′
ùR
$??E
;Oé$?
?
? ?v ?±25'' ?77?F ??!,+{J=?? ?
&ìü1
g??
ü1
?
üz
?
??
?
.)
μ &L?
? ?9 ?
??
[{
￥?F¨ ?? ?$??G ?
R? ?v ?1 ?
??
7cE&
<l]?
???G
???G
7′
?v7′ ?7 ? ?1 ?
]Y
??Eüz
2.5kPa
7kPa
30kPa
J ? &
$ì¤ ??D ?
]Yμ &?×
??E!μ &?×
n$ì¤
]Y?GN ?
??E?GN ?
?
kPa
kPa
kPa
mA
?
?
?
?
°C
°C
gRMS
g
cycles
grams
C#
≈0–10"H2O
≈0–1psi
≈0–5psi
à$? ?10 ?
2mAmax.
@50VDC
±25%
±20%
±20%
–40to+257°F
+32°to+158°F
20to2000Hz
11
a1
<0.27Z
>?
2.5kPa
±2
50
0.1
0.05
0.5
–1
±0.5
5
5
;O
8
90
1.0
0.2
3
3
0.75
C#
2
2
2
3
4
4
5
6,11
6,11
′e
2.5
7
30
5[
1.5
10
7
3,200
5,000
5,000
–40to+125
0to+70
10
100
1x10
6
<5
??d ?
??? c^
?
μ??òμcò?ár?òJ?RTV?á?4l
?òμcò?á?4l?RTV ?9 ?
?
mV
mV
mV
mV
%FSO
%FSO
%FSO
%FSO
%FSO
μV/V
μV/V
;L
–8
25
–1.0
–0.2
–3
–3
–0.75
>?
7&30kPa
±2
75
100
0.05
0.05
0.5
–0.5
±0.2
5
5
;O
4
150
125
0.25
0.2
2
1.5
0.5
;L
–4
50
75
–0.25
–0.2
–2
–1.5
–0.5
C#:
1.]Y,]Yμ &?×???Eμ &?×!?! ?v#2.&ì?N1.5mA!??Eüz
3.;?
écGJ######4.0~70''7y25''
5.0~70''######6.-e!??/???$–400Lè>?e ?±?.?JU|
7.
u=!U?e±25''?1.5mA? ?? ?+J=??##8.±μ &L?H￥? ?e? &I#?
9.W?×$??Kovar8μ+cò
bμ####10.??$?
11.>?e@°7y ?g$Rv×??
é ?7′ ?
29
GEì
??Jf
g
GE
s
-?U?
111210
5?46
1.85(0.073)
1.96(0.077)
CERAMIC
SUBSTRATE
2
DIA.
21.97(0.865)
22.48(0.885)
7.56(0.298)
7.67(0.302)
12.59(0.496)
12.80(0.504)
DIA.
DIA.
DIA.
3.18(0.125)
3
TOP
PORT
0.51(0.020)
0.56(0.022)
11.55(0.455)
12.32(0.485)
4.67(0.184)
4.83(0.190)
11.30(0.445)
11.56(0.455)
6.55(0.258)
6.96(0.274)
J?
4
5
6
10
áv
+OUT
+IN
–IN
–OUT
C#:
1?
u=^AV
aò ?EA ???
2?W?×$?ù17.15?0.051(0.675?0.010),ù &U?tG J?!????? ?×t4? fW????
3?$?ù &?19.33-0.635/+0.889(0.761-0.025/+0.035),×$?ù &?19.33-0.635/+1.40(0.761-0.025/+0.055)
NovaSensor
$?
??=$?W
G^u
8=TO-8
?H=?c f ?HybridSubstrate
A=g$
G=$
D=×$
$?L? ?ù? ?
002.5=2.5kPa@10inch
007=7kPa@1psiH2O
030=30kPa@4.3psi
NPZZH?–XYYY
G|
^A?x+? ? ?
x+? ?
30
GEì
??Jf
g
GE
s
-?U?
|
|
